Executive Officers

Richard S. Hill Chairman of the Board and Chief Executive Officer Jeffrey C. Benzing Executive Vice President and Chief Administrative Officer Fusen Chen Ph. D. Executive Vice President, Chief Technology Officer and General Manager, Gapfill Business Unit Tom Caulfield, Ph.D. Executive Vice President, Sales, Marketing, and Customer Service Gino Addiego Ph.D. Executive Vice President of Corporate Operations Patrick J. Lord, Ph.D Senior Vice President, Business Development and Strategic Planning, and Acting General Manager, CMP Business Unit Timothy M. Archer Senior Vice President and General Manager, PECVD Business Unit Martin J. Collins Senior Vice President and General Counsel

Richard S. Hill Chairman of the Board and Chief Executive Officer Richard S. Hill has been Novellus' chief executive officer and a member of the board of directors since 1993. He was appointed chairman of the board in May 1996. Before joining Novellus, Mr. Hill spent 12 years at Tektronix, Inc., where he held a variety of positions, including president of Tektronix Development Company, vice president of the Test and Measurement Group and president of Tektronix Components Corporation. Prior to joining Tektronix, he held engineering management positions at General Electric, Motorola and Hughes Aircraft Company. Mr. Hill holds a bachelor's degree in engineering from the University of Illinois and a master's degree in business administration from Syracuse University. He is a board member of the University of Illinois Foundation and serves on the boards of LSI and Arrow Electronics.